Publisher

John Wiley & Sons

Publication Year 2013
ISBN-13

ISBN 9783527334995

ISBN-10 3527334998
Binding

Paperback

Number of Pages 608 Pages
Subject

Electronics engineering

This softcover edition of the eponymous volume from the successful \"Advanced Micro & Nanosystems\" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation. .
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