ISBN 9781259029585,Ic Fabrication Technology

Ic Fabrication Technology



Tata McGraw - Hill Education

Publication Year 2014

ISBN 9781259029585

ISBN-10 1259029581


Number of Pages 384 Pages
Language (English)

Electrical & Electronic Engineering

IC fabrication technology is at the core of the subject of VLSI. For, practical implementation of the design and principles of VLSI is possible only through an in depth understanding of the fabrication processes and procedures. In order that young undergraduate students be initiated into this extremely dynamic yet, complex world of fabrication, IC Fabrication Technology has been written in a highly illustrative manner that allows comprehensive visualization. The book provides an introduction to the major fabrication process steps for silicon based CMOS technology and provides necessary literature that can help generate experiments. Thus, the undergraduate students pursuing a course on IC fabrication will find this book necessary and postgraduate students pursuing the discipline of VLSI will find this book handy. Books features Detailing - All important and critical steps to silicon IC fabrication have been detailed with clarity on material, temperature, etc considerations. True to life Scenarios - Vivid descriptions to problems encountered in laboratories have been presented with practical solutions. ULSI Technology - Current research, especially those that are aimed at providing a solution to the ever increasing cry for higher speed, lower power and maximum number of functional ICs on a chip, are discussed briefly in the chapter on ULSI (nano) Fabrication. Table of Contents: Overview of Metal Oxide Semiconductor (MOS) Transistor Silicon Wafer Preparation for MOS Transistor Fabrication MOS Transistor Process Flow Oxidation Mask Lithography Etching Diffusion Ion-Implantation Thin Film Deposition ULSI (nano) Fabrication