ISBN 9788181285461,Microsystem Design

Microsystem Design

Publisher:

Springer

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ISBN 9788181285461
Publisher

Springer

Publication Year 2001
ISBN-13

ISBN 9788181285461

ISBN-10 8181285468
Binding

Paper Back

Number of Pages 720 Pages
Language (English)
Subject

Microsystem

Table Of Contents
Part 1 Getting Started

Introduction
An Approach To Mems Design
Microfabrication
Process Integration
Part 2 Modeling Strategies

Lumped Modeling
Energy-Conserving Transducers
Dynamics
Part 3 Domain-Specific Details

Elasticity
Structures
Energy Methods
Dissipation And Thermal Energy Domain
Lumped Modeling Of Dissipative Processes
Fluids
Part 4 Circuit And System Issues

Electronics
Feedback System
Noise
Part 5 Case Studies

Packaging
A Piezoresistive Pressure Sensor
A Capacitive Accelerometer
Electrostatics Projection Displays
A Piezoelectric Rate Gyroscope
Dna Amplification
A Microbride Gas Sensor

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