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RF MEMS: Theory, Design and Technology


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Wiley India Pvt Ltd

Publication Year 2010-03-16

ISBN 9788126525805

ISBN-10 8126525800


Number of Pages 506 Pages
Language English
RF MEMS, such as switches, varactors and phase shifters, exhibit virtually zero power consumption or loss. For that reason these types of devices are being developed intensively by many corporations for potential use in telecommunications equipment. This book sets out the basics of RF MEMS and describes how to design practical devices and circuits. As well as covering fundamentals, Rebeiz discusses the 'tricks of the trade' and presents a range of real-world applications. The author was the recipient of the 2000 IEEE Microwave Prize and is a consultant for Rockwell, Raytheon, Analog Devices and Agilent.

Table of Contents:


  • Chapter 1- Introduction: RF MEMS for Microwave Applications
  • Chapter 2- Mechanical Modeling of MEMS Devices: Static Analysis
  • Chapter 3- Mechanical Modeling of MEMS Devices: Dynamic Analysis
  • Chapter 4- Electromagnetic Modeling of MEMS Switches
  • Chapter 5- MEMS Switch Library
  • Chapter 6-MEMS Switch Fabrication and Packaging
  • Chapter 7-MEMS Switch Reliability and Power Handling
  • Chapter 8- Design of MEMS Switch Circuits
  • Chapter 9-MEMS Phase Shifters
  • Chapter 10- Distributed MEMS Phase Shifters and Switches
  • Chapter 11- MEMS Varactors and Tunable Oscillators
  • Chapter 12- Micro machined Inductors
  • Chapter 13- Reconfigurable MEMS Networks, Filters, Antennas and Subsystem
  • Chapter 14- Phase Noise Analysis of MEMS Circuits, Phase Shifters and Oscillators
  • Chapter 15- Future Work in RF MEMS

Appendix A: Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors and Tunable Filters
Appendix B: Mechanical, Electrical and Thermal Properties of RF MEMS Materials