ISBN 9788126529919,Rf Mems And Their Applications

Rf Mems And Their Applications



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ISBN 9788126529919


Publication Year 2011

ISBN 9788126529919

ISBN-10 8126529911

Paper Back

Number of Pages 408 Pages
Language (English)

Basic Engineering

The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. Varadan's book will be the first of it's kind to address this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities.

Table of Contents
Microelectromechanical Systems (MEMS) and Radio Frequency MEMS
MEMS Materials and Fabrication Techniques
RF MEMS Switches and Micro Relays
MEMS Inductors and Capacitors
Micromachined RF Filters
Micromachined Phase Shifters
Micromachined Transmission Lines and Components
Micromachined Antennae
Integration and Packaging for RF MEMS Devices