ISBN 9780198084808,The Science And Engineering Of Microelectronic Fabrication

The Science And Engineering Of Microelectronic Fabrication



Oxford University Press

Publication Year 2012

ISBN 9780198084808

ISBN-10 0198084803


Edition 2nd
Number of Pages 624 Pages
Language (English)

Electronics & Communication Engineering

Stephen A. Campbell's The Science and Engineering of Microelectronic Fabrication, published by Oxford University Press, is a comprehensive book for Electronics and Communication Engineering students. It comprises of unit processes like: Hot Processing and Ion Implantation, Pattern Transfer, Thin Films, and Process Integration. The book also contains full chapter in MEMS and discusses the Basics of Mechanics, Mechanics of Common MEMS Devices, Surface Micromachining Basics, Bulk Micromachining Process Flow, Stress in Thin Films, Mechanical to Electrical Transduction, Bulk Micromachining Etching Techniques, Surface Micromachining Process Flow, MEMS, Actuators, HARMST - High Aspect Ratio Microsystems Technology, and discusses how to use readily available popular software like SUPREM III. The book serves as an extensive resource on the subject for both engineering students and professionals.

About Oxford University Press

Oxford University Press is a renowned publishing house that develops and publishes high quality textbooks, scholarly works, and academic books for school courses, bilingual dictionaries and also digital materials for both learning and teaching. It is a division of the University of Oxford. The first book was local published in the year 1912. Some of the books published under their banner are India's Ancient Past, Atkins' Physical Chemistry, Companion to Politics in India, Sociology: Themes and Perspectives and Common Mistakes at IELTS Advanced ...and How to Avoid Them.