ISBN 9783527334988,Enabling Technologies for MEMS and Nanodevices

Enabling Technologies for MEMS and Nanodevices

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ISBN 9783527334988
Publisher

John Wiley & Sons

Publication Year 2013
ISBN-13

ISBN 9783527334988

ISBN-10 352733498X
Binding

Paperback

Number of Pages 439 Pages
Subject

Materials science

Now available in softcover, this practical book closely examines the enabling technologies for the fabrication of micro- and nanodevices, covering everything from commercialization, packaging, and simulation, right up to DNA sensor arrays.
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