ISBN 9780849312625,MEMS and NEMS

MEMS and NEMS

Publisher:

CRC Press

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ISBN 9780849312625
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ISBN 9780849312625
Publisher

CRC Press

Publication Year 2002
ISBN-13

ISBN 9780849312625

ISBN-10 0849312620
Binding

Hardback

Number of Pages 461 Pages
Subject

Electronics & communications engineering

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.
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